JPH0336784U - - Google Patents
Info
- Publication number
- JPH0336784U JPH0336784U JP9490189U JP9490189U JPH0336784U JP H0336784 U JPH0336784 U JP H0336784U JP 9490189 U JP9490189 U JP 9490189U JP 9490189 U JP9490189 U JP 9490189U JP H0336784 U JPH0336784 U JP H0336784U
- Authority
- JP
- Japan
- Prior art keywords
- injection
- pressurized gas
- gas passage
- article
- passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002347 injection Methods 0.000 claims description 12
- 239000007924 injection Substances 0.000 claims description 12
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9490189U JPH0336784U (en]) | 1989-08-11 | 1989-08-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9490189U JPH0336784U (en]) | 1989-08-11 | 1989-08-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0336784U true JPH0336784U (en]) | 1991-04-10 |
Family
ID=31644183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9490189U Pending JPH0336784U (en]) | 1989-08-11 | 1989-08-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0336784U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015126174A (ja) * | 2013-12-27 | 2015-07-06 | 芝浦メカトロニクス株式会社 | 基板保持装置及び基板保持方法 |
-
1989
- 1989-08-11 JP JP9490189U patent/JPH0336784U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015126174A (ja) * | 2013-12-27 | 2015-07-06 | 芝浦メカトロニクス株式会社 | 基板保持装置及び基板保持方法 |